Shiyu Wang

Addressing the urgent demand for high-precision pressure measurement in real-time barometric monitoring, aerospace, and industrial control, this paper presents a high-accuracy MEMS resonant pressure sensor based on electrostatic excitation and piezoresistive detection. The sensor incorporates a symmetric double-ended fixed-finger comb-drive resonator structure, driven into stable vibration at its natural frequency by an alternating electrostatic force. Piezoresistors integrated at the root of the resonant beams transduce the mechanical vibration into a frequency output, enabling precise external pressure measurement. Experimental results show that the developed sensor achieves an accuracy of 0.009% FS over a pressure range of 0–350 kPa across an operating temperature span from −30 °C to 50 °C, with a room-temperature repeatability error below 0.008% FS, demonstrating excellent measurement stability. Building on this performance, a real-time atmospheric pressure monitoring experiment was conducted, yielding a mean absolute percentage error of less than 0.05%, highlighting the sensor’s potential for engineering practicality. This work provides an effective technique for a high-precision, high-stability resonant pressure sensor, with clear potential for deployment in real-time barometric monitoring, aerospace, and industrial control applications.

Addressing the urgent demand for high-precision pressure measurement in real-time barometric monitoring, aerospace, and industrial control, this paper presents a high-accuracy MEMS resonant pressure sensor based on electrostatic excitation and piezoresistive detection. The sensor incorporates a symmetric double-ended fixed-finger comb-drive resonator structure, driven into stable vibration at its natural frequency by an alternating electrostatic force. Piezoresistors integrated at the root of the resonant beams transduce the mechanical vibration into a frequency output, enabling precise external pressure measurement. Experimental results show that the developed sensor achieves an accuracy of 0.009% FS over a pressure range of 0–350 kPa across an operating temperature span from -30 °C to 50 °C, with a room-temperature repeatability error below 0.008% FS, demonstrating excellent measurement stability. Building on this performance, a real-time atmospheric pressure monitoring experiment was conducted, yielding a mean absolute percentage error of less than 0.05%, confirming the sensor's engineering practicality. This work provides an effective technique for a high-precision, high-stability resonant pressure sensor, with clear potential for deployment in real-time barometric monitoring, aerospace, and industrial control applications.

随着工业安全与环境监测要求的不断提高，基于催化燃烧原理的超高灵敏度甲烷气体检测技术日益受到广泛关注。目前，传统催化燃烧气体传感器普遍面临灵敏度不足、检测下限较高、稳定性以及成本等难以兼顾的挑战。本研究以天然凹凸棒土为载体、构建了表面负载钯纳米颗粒的纳米复合结构，用于催化燃烧气体传感器。通过分步浸润涂覆与氩气氛围热处理工艺，成功实现了钯纳米颗粒在载体表面的均匀负载，其负载浓度与传感性能呈非线性关系，在2.0 wt%的最佳负载浓度下性能最优。系统测试表明，该传感器对甲烷展现出卓越的传感性能：对200-10000ppm甲烷浓度的响应值符合Langmuir吸附模型（R²>0.998） ，该传感器的理论最大响应值为73.03 mV。在低浓度区间（200-1000 ppm）响应值的线性度极佳（R²>0.998） ，灵敏度为1.51 µV/ppm，检测下限（LOD）达到5 ppm以下，远低于相关安全标准阈值；同时，其响应/恢复时间（18.5s/41.5 s）优于目前市售产品，并在重复性（75次循环响应值衰减< 9.3%）、长期稳定性（30天后信号衰减仅1.87%）、一致性（电阻偏差值ΔR < 0.8%）、特异性（对O₂、N₂和CO₂等常见大气组分无交叉响应）及抗环境温湿度干扰（10-45℃及60%-100% RH下I/V曲线稳定）方面表现优异。机理研究表明，其反应遵循Eley-Rideal (E-R)机理。基于所制备传感器在灵敏度、检测限、稳定性及抗干扰能力上的显著优势，该传感器在工业安全监测、智能家居燃气报警及环境甲烷溯源等领域展现出巨大的应用潜力。