Lei Zhang

A single-crystal magnesium oxide (MgO) dual-Fabry–Perot (FP)-cavity sensor based on MEMS technology and laser micromachining is proposed for simultaneous measurement of temperature and pressure. The pressure sensitive cavity is processed by wet chemical etching and direct bonding, which can improve machining efficiency, ensure the quality of the reflection surface and achieve thermal stress matching. Femtosecond laser and micromachining technologies are used to fabricate a rough surface and a through hole to reduce the reflect surface and fix the optical fiber. The bottom surface of the pressure cavity and the upper surface of the MgO wafer form a temperature cavity. A cross-correlation signal demodulation algorithm combined with a temperature decoupling method is proposed to achieve dual-cavity demodulation and eliminate the cross-sensitivity between temperature and pressure, improving the accuracy of pressure measurement. Experimental results show that the proposed sensor can stably operate at an ambient environment of 22–800 °C and 0–0.5 MPa with a pressure sensitivity of approximately 0.20 µm/MPa (room temperature), a repeatability error of 2.06% and a hysteresis error of 1.90%. After temperature compensation, thermal crosstalk is effectively eliminated and the pressure measurement accuracy is 2.01%F.S.