Wei Chang

The detection of bolt preload force is of vital importance for ensuring the structural reliability of equipment under extreme operating conditions. Traditional ultrasonic transducers based on bulk piezoelectric materials suffer from poor long-term coupling stability and high brittleness of the material, which limits their practical applications. In this work, AlN piezoelectric thin films were fabricated by RF magnetron sputtering, and the effects of RF power and target-to-substrate distance on film morphology, crystal structure, and ultrasonic response were investigated. The results show that increasing RF power increased the film thickness and deposition rate, reduced the detected O content on the film surface, and changed the XRD response. The film deposited at 900 W generated ultrasonic longitudinal wave echoes with a relatively high signal amplitude among the tested RF powers. Among the tested target-to-substrate distances, the film deposited at 60 mm showed a relatively higher deposition rate and generated an ultrasonic longitudinal wave echo with a relatively higher amplitude. The measured d₃₃ value of this film was approximately 4.8 pC/N. The AlN thin-film ultrasonic transducers prepared under the selected deposition conditions were directly deposited on bolts, and the effects of temperature and axial load were calibrated using the ultrasonic TOF measurement method. There was a linear correlation between the TOF and the temperature (R² > 99.99%), as well as between the TOF and the axial load. These results indicate that the deposited AlN thin-film transducer has potential for bolt preload measurement in wind turbine bolts.