Round pinholes in indium-tin-oxide thin films on the glass substrates: a Taguchi method analysis and theoretical approach to their origins
Authors:
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Pinholes in Al thin films: their effects on TFT characteristics and a taguchi method analysis of their originsVacuum, 2000
- Deposition of transparent and conducting indium-tin-oxide films by the r.f.-superimposed DC sputtering technologyThin Solid Films, 1999
- Use of the magnetron-sputtering technique for the control of the properties of indium tin oxide thin filmsSurface and Coatings Technology, 1999
- Properties of indium tin oxide films prepared by rf reactive magnetron sputtering at different substrate temperatureThin Solid Films, 1998
- Optimization of sputtered ITO films with respect to the oxygen partial pressure and substrate temperatureThin Solid Films, 1997