Early stages of oxidation of aluminum nitride
Authors:
- 1 July 1999
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 14 (7) , 2708-2711
Abstract
The early stages of oxidation of aluminum nitride have been studied by transmission electron microscopy and electron diffraction. It has been found that the oxide layer grows by the Stranki–Krastonow mechanism, where an initial uniform layer is followed by island formation. The onset of oxidation occurs at 800 °C and the initial oxide phase that forms is γ–Al2O3, one of the transition aluminas. The orientation relationship between the oxide layer and the underlying nitride is (440)γ∥(1120)AINand [112]γ∥[0110]AIN.Keywords
This publication has 21 references indexed in Scilit:
- Glass-ceramic interactions and thick-film metallization of aluminium nitrideJournal of Materials Science, 1991
- Nucleation and growth of thin filmsReports on Progress in Physics, 1984
- Pseudomorphic Structure at the Interface of Ge on Si(111) Studied by High-Energy-Ion ScatteringPhysical Review Letters, 1981
- The oxidation of metalsReports on Progress in Physics, 1974
- Some Properties of Aluminum NitrideJournal of the Electrochemical Society, 1960
- One-dimensional dislocations - III. Influence of the second harmonic term in the potential representation, on the properties of the modelProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 1949
- One-dimensional dislocations. II. Misfitting monolayers and oriented overgrowthProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 1949
- One-dimensional dislocations. I. Static theoryProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 1949
- Theory of the oxidation of metalsReports on Progress in Physics, 1949
- Über Anlauffarben von MetallenZeitschrift für anorganische und allgemeine Chemie, 1920