Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique
Authors:
- Yongjun ZhaoYZYongjun Zhao
- Tianhong CuiTCTianhong Cui
- 17 March 2003
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 13 (3) , 430-435
Abstract
No abstract availableKeywords
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