Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets
Authors:
- Tomáš KubartTKTomáš Kubart
- Martin ČadaMČMartin Čada
- Daniel LundinDLDaniel Lundin
- Zdeněk HubičkaZHZdeněk Hubička
- 1 January 2014
- journal article
- research article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 238, 152-157
Abstract
No abstract availableKeywords
Funding Information
- Volkswagen Foundation
- Grant Agency of Czech Republic (P108/12/2104)
- MSMT of the Czech Republic (LD12002, LH12043)
- European Collaboration in Science and Technology (COST Action (MP0804)
- Swedish Research Council
- Université Paris-Sud
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