Features of laser oxidation of thin films of titanium

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Abstract
This paper discusses the possibility of direct single-stage thermochemical recording on thin-film titanium, based on the difference of the optical properties of the film in the irradiated and unirradiated areas. A technique is proposed for theoretically analyzing the process of oxidizing thin metallic films, allowing for the change of the film’s absorptivity during irradiation. The main regularities of the process of laser oxidation of titanium films are determined, and, among other things, it is shown that it is preferable to use the thinnest possible films for thermochemical recording.