Nanoimprint lithography using IR laser irradiation
Authors:
- V. GrigaliūnasVGV. Grigaliūnas
- S. TamulevičiusS. Tamulevičius
- M. MuehlbergerMMM. Muehlberger
- D. JuciusDJD. Jucius
- A. GuobienėAGA. Guobienė
- V. KopustinskasVKV. Kopustinskas
- A. GudonytėAGA. Gudonytė
- 1 November 2006
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 253 (2) , 646-650
Abstract
No abstract availableKeywords
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