Fractal analysis on the surface topography of Monocrystalline silicon wafers sawn by diamond wire
Authors:
- Tengyun LiuTLTengyun Liu
- Peirong ZhangPZPeirong Zhang
- Yancai SuYSYancai Su
- Yujing SunYSYujing Sun
- 2 June 2024
- journal article
- research article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 180
Abstract
No abstract availableKeywords
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