Fractional-order control of a hybrid pneumatic-piezoelectric nanopositioning system for high-precision and energy-efficient motion
- 8 December 2025
- journal article
- research article
- Published by Springer Nature in The International Journal of Advanced Manufacturing Technology
- Vol. 142 (1-2) , 801-819
Abstract
No abstract availableKeywords
Funding Information
- National Science and Technology Council (NSTC 112-2221-E-032-032, NSTC 113-2221-E-005-088-)
- National Science and Technology Council (NSTC 112-2221-E-005-071-MY2)
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