Fabrication and test of a MEMS combustor and reciprocating device
Authors:
- 19 December 2001
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (1) , 26-34
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etchingJournal of Microelectromechanical Systems, 1999
- Combustors for Micro-Gas Turbine EnginesJournal of Fluids Engineering, 1998