The Effects of Contents of Oxygen in Argon-Oxygen Mixed Gas on Polyethylene Terephthalate (PET) Films by CCP Discharge
Authors:
- 1 January 2013
- journal article
- Published by Trans Tech Publications, Ltd. in Advanced Materials Research
- Vol. 651, 257-262
Abstract
In the present work, Polyethylene terephthalate (PET) films have been exposed to capacitive coupled plasma (CCP) to improve their surface properties for fabricated devices. Contact angle measurements and atomic force microscopy (AFM) showed an increase in surface roughness resulting in the decrease of contact angle. Surface composition and morphology of the films were analyzed by X-ray photoelectron spectroscopy (XPS) and AFM. It was found that the plasma treatment modified the surfaces both in chemical composition and morphology. Change of chemical composition made the polymer surfaces to be highly hydrophilic, which mainly depends on the increase in oxygen-containing groups. And the results of optical emission spectroscopy (OES) proved that appropriate content of oxygen in mixture gas can create the greatest number of active species to form O*-C causes groups on surface which can easily form C-O-metal bonds, lead to improve adhesion properties.Keywords
This publication has 14 references indexed in Scilit:
- The effects of energetic ion irradiation on metal-to-polymer adhesionRadiation Physics and Chemistry, 2012
- Improving interfacial adhesion between thermoplastic polyurethane and copper foil using amino carboxylic acidsJournal of Applied Polymer Science, 2009
- Adhesion and interfacial characteristics of metal/PI composite film modified by O2 ion beamThin Solid Films, 2008
- Adhesion and adhesion changes at the copper metal–(acrylonitrile–butadiene–styrene) polymer interfaceThin Solid Films, 2007
- Gold coating of polyethylene modified by argon plasma dischargePolymer Engineering & Science, 2006
- Adhesion of metals to plasma-induced functional groups at polymer surfacesSurface and Coatings Technology, 2005
- Electroless plating of copper on polyimide films modified by surface grafting of tertiary and quaternary amines polymersPolymer, 2002
- Chemical interaction, adhesion and diffusion properties at the interface of Cu and plasma-treated thiophene-based plasma polymer (ThioPP) filmsThin Solid Films, 2001
- Chemical reactions at polymer surfaces interacting with a gas plasma or with metal atoms — their relevance to adhesionSurface and Coatings Technology, 1999
- Adhesion behavior of PVD coatings on ECR plasma and ion beam treated polymer filmsThin Solid Films, 1996