MoO2 as a thermally stable oxide electrode for dynamic random-access memory capacitors
- 15 November 2018
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry C
- Vol. 6 (48) , 13250-13256
Abstract
MoO2 is a promising oxide electrode with excellent thermal stability for next-generation DRAM capacitors.Keywords
Funding Information
- National Research Foundation of Korea (NRF-2018R1A2B2007525)
- Korea Institute of Science and Technology (2E28210)
- National Science Foundation (1729016, 1720139)
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