The influence of substrate on the adhesion behaviors of atomic layer deposited aluminum oxide films
Authors:
- J.N. DingJDJ.N. Ding
- X.F. WangXWX.F. Wang
- N.Y. YuanNYN.Y. Yuan
- C.L. LiCLC.L. Li
- Y.Y. ZhuYZY.Y. Zhu
- B. KanBKB. Kan
- 1 January 2011
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 205 (8-9) , 2846-2851
Abstract
No abstract availableKeywords
Funding Information
- Qing Lan Project (2008-04)
- National Natural Science Foundation of China (50975130)
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