Patterning of circular structure arrays with interference lithography
Authors:
- 1 November 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Vol. 21 (6) , 2883-2887
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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