Array of Micromachined Components Fabricated Using “Micro-Origami” Method
Authors:
- Alexander Vorob'EVAVAlexander Vorob'EV
- Pablo VaccaroPVPablo Vaccaro
- Kazuyoshi KubotaKKKazuyoshi Kubota
- Shanmugam SaravananSSShanmugam Saravanan
- Tahito AidaTATahito Aida
- 30 June 2003
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 42 (Part 1, No) , 4024-4026