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Publications
A Technology for Reducing Flicker Noise for ULSI Applications
Home
Publications
A Technology for Reducing Flicker Noise for ULSI Applications
A Technology for Reducing Flicker Noise for ULSI Applications
Authors:
KT
Koutarou Tanaka
Koutarou Tanaka
KW
Kazufumi Watanabe
Kazufumi Watanabe
HI
Hideaki Ishino
Hideaki Ishino
SS
Shigetoshi Sugawa
Shigetoshi Sugawa
AT
Akinobu Teramoto
Akinobu Teramoto
MH
Masaki Hirayama
Masaki Hirayama
TO
Tadahiro Ohmi
Tadahiro Ohmi
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30 April 2003
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 42
(Part 1, No)
,
2106-2109
DOI:
10.1143/jjap.42.2106
Abstract
No abstract available
Keywords
FLICKER NOISE
SURFACE ROUGHNESS
AFM
Cited
Cited by 20 articles
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