Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
Authors:
- Jiwang YanJiwang Yan
- Tooru AsamiTATooru Asami
- Hirofumi HaradaHHHirofumi Harada
- Tsunemoto KuriyagawaTKTsunemoto Kuriyagawa
Top Cited Papers
- 1 October 2009
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 33 (4) , 378-386
Abstract
No abstract availableThis publication has 31 references indexed in Scilit:
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