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  3. Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
  4. Publication with shared reference
  5. 10.1016/j.precisioneng.2008.10.008
  1. Home
  2. Publications
  3. Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
  4. Publication with shared reference
  5. 10.1016/j.precisioneng.2008.10.008

Publications with shared reference:

Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining

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