Nanoscale topography and spatial light modulator characterization using wide-field quantitative phase imaging
Authors:
- Gannavarpu RajshekharGRGannavarpu Rajshekhar
- Basanta BhaduriBBBasanta Bhaduri
- Chris EdwardsCEChris Edwards
- Renjie ZhouRZRenjie Zhou
- Lynford L. GoddardLGLynford L. Goddard
- Gabriel PopescuGabriel Popescu
- 5 February 2014
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 22 (3) , 3432-3438
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
Funding Information
- National Science Foundation (NSF) (CBET-1040462 MRI)
This publication has 22 references indexed in Scilit:
- Computerized interferometric surface measurements [Invited]Applied Optics, 2012
- Dynamic measurements using a Fizeau interferometer2011
- Phase map retrieval in digital holography: avoiding the undersampling effect by a lateral shear approachOptics Letters, 2007
- Phase calibration of spatially nonuniform spatial light modulatorsApplied Optics, 2004
- Environmentally friendly interferometry2004
- Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscopeApplied Physics Letters, 2003
- Surface metrologyMeasurement Science and Technology, 1997
- Characterization of surface topography by SEM and SFM: problems and solutionsJournal of Physics D: Applied Physics, 1997
- High-speed noncontact profiler based on scanning white-light interferometryApplied Optics, 1994
- Stylus profiling instrument for measuring statistical properties of smooth optical surfacesApplied Optics, 1981