Intrinsic mechanical properties of ultra-thin amorphous carbon layers
- 21 January 2007
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 253 (14) , 6165-6175
Abstract
No abstract availableKeywords
This publication has 42 references indexed in Scilit:
- Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodologyJournal of Materials Research, 2004
- Nanoindentation and FEM study of the effect of internal stress on micro/nano mechanical property of thin CNx filmsThin Solid Films, 2000
- Interpretation of Raman spectra of disordered and amorphous carbonPhysical Review B, 2000
- A scientific approach to hardness:Materials Letters, 1999
- Compensating for elastic deformation of the indenter in hardness tests of very hard materialsJournal of Materials Research, 1999
- Photoluminescence and Raman spectroscopy in hydrogenated carbon filmsIEEE Transactions on Magnetics, 1997
- Improvements in the indentation method with a surface force apparatusPhilosophical Magazine A, 1996
- Hardness measurements of thin films-determining the critical ratio of depth to thickness using FEMThin Solid Films, 1995
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- Elastic Properties of GlassesPhysical Review Letters, 1985