Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS
Authors:
- W.Robert AshurstWAW.Robert Ashurst
- 1 July 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 91 (3) , 239-248
Abstract
No abstract availableKeywords
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