Study for the Design of Eddy Current Microsensor Arrays for Non Destructive Testing Applications

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Abstract
In this paper, an experimental study was carried out for the design of microsensor arrays dedicated to eddy current non destructive applications. A 3-microcoil 1-D array sensor was realized thanks to microtechnology. Since each coil can be used as a transmitter or a receiver, five different transmission- reception strategies were considered for the inspection of a nickel based alloy target, featuring several calibrated surface notches. While the most basic strategy did not detect the smallest notch (0.1 x 0.1 x 0.1 mm3), the best strategy detected it with a 20 dB signal to noise ratio. The detection performances were then analyzed versus frequency and versus notch size.

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