Reactive plasma deposited SixCyHz films

This publication has 10 references indexed in Scilit:

• Reaction mechanisms of the radio frequency glow discharged deposition process in silane-helium
  Thin Solid Films, 1979
• Effects of the silicon-to-carbon ratio and the hydrogen content in amorphous SiC thin films prepared by reactive sputtering
  Thin Solid Films, 1979
• Photoluminescence in the amorphous system SixC1−x
  Applied Physics Letters, 1978
• Hydrogen bonding in silicon-hydrogen alloys
  Philosophical Magazine Part B, 1978
• Optical properties of amorphous SixGe1−x(H) alloys prepared by R.F. Glow discharge
  Solid State Communications, 1977
• Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
  Physical Review B, 1977
• Electrical and optical properties of amorphous silicon carbide, silicon nitride and germanium carbide prepared by the glow discharge technique
  Philosophical Magazine, 1977
• Formation de dépôts de nitrure de silicium en couche mince obtenus par réaction chimique dans une décharge R.F. Basse pression
  Thin Solid Films, 1976
• Optical and Electrical Properties of SiC Films Prepared in a Microwave Discharge
  Journal of the Electrochemical Society, 1968
• The Mass Spectra of Volatile Hydrides. I. The Monoelemental Hydrides of the Group IVB and VB Elements
  Inorganic Chemistry, 1963