A single-layer tilting actuator with multiple close-gap electrodes
Authors:
- T ShmilovichTST Shmilovich
- S KrylovSKS Krylov
- 8 July 2009
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 19 (8)
Abstract
No abstract availableKeywords
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