Gold-based thin multilayers for ohmic contacts in RF-MEMS switches
- 6 January 2012
- journal article
- Published by Springer Nature in Microsystem Technologies
- Vol. 18 (7-8) , 965-971
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Electrical and mechanical properties of layered gold–chromium thin films for ohmic contacts in RF-MEMS switchesMaterials Science and Engineering: B, 2009
- Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switchesJournal of Micromechanics and Microengineering, 2008
- Microstructural length-scale effects in the nanoindentation behavior of thin gold filmsActa Materialia, 2006
- Characterization of metal and metal alloy films as contact materials in MEMS switchesJournal of Micromechanics and Microengineering, 2006
- Selecting metal alloy electric contact materials for MEMS switchesJournal of Micromechanics and Microengineering, 2004
- Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodologyJournal of Materials Research, 2004
- Contact measurements providing basic design data for microrelay actuatorsSensors and Actuators A: Physical, 1999
- Yielding and strain hardening of thin metal films on substratesScripta Materialia, 1998
- Elastic and plastic properties of thin films on substrates: nanoindentation techniquesMaterials Science and Engineering: A, 1997
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992