Hybrid machine learning system for integrated yield management in semiconductor manufacturing
Authors:
- Boo-Sik KangBKBoo-Sik Kang
- Jang-Hee LeeJLJang-Hee Lee
- Chung-Kwan ShinCSChung-Kwan Shin
- Song-Jin YuSYSong-Jin Yu
- Sang-Chan ParkSPSang-Chan Park
- 1 August 1998
- journal article
- Published by Elsevier in Expert Systems with Applications
- Vol. 15 (2) , 123-132
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- The binomial test: a simple tool to identify process problemsIEEE Transactions on Semiconductor Manufacturing, 1995
- An integrated framework for yield management and defect/fault reductionIEEE Transactions on Semiconductor Manufacturing, 1995
- Semiconductor yield improvement: results and best practicesIEEE Transactions on Semiconductor Manufacturing, 1995
- A REVIEW OF PRODUCTION PLANNING AND SCHEDULING MODELS IN THE SEMICONDUCTOR INDUSTRY PART I: SYSTEM CHARACTERISTICS, PERFORMANCE EVALUATION AND PRODUCTION PLANNINGIIE Transactions, 1992
- The self-organizing mapProceedings of the IEEE, 1990
- The use and evaluation of yield models in integrated circuit manufacturingIEEE Transactions on Semiconductor Manufacturing, 1990
- Generalization of backpropagation with application to a recurrent gas market modelNeural Networks, 1988
- An introduction to computing with neural netsIEEE ASSP Magazine, 1987