Organic solvent-free sugar-based transparency nanopatterning material derived from biomass for eco-friendly optical biochips using green lithography
Authors:
- 8 May 2014
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 9129, 912917-912917-9
Abstract
No abstract availableKeywords
This publication has 27 references indexed in Scilit:
- Coherent diffractive imaging microscope with a tabletop high harmonic EUV source2013
- Model of freeform illumination mode and polarization mode for 193nm immersion lithographic machine2013
- Imaging application tools for extremely low-k1 ArF immersion lithography2013
- Important processes in modeling and optimization of EUV lithography sources2013
- Balancing lithographic performance and resist outgassing in EUV resists2013
- Towards manufacturing a 10nm node device with complementary EUV lithography2013
- Self-Assembled Incorporation of Modulated Block Copolymer Nanostructures in Phase-Change Memory for Switching Power ReductionACS Nano, 2013
- Nanoparticle free polymer blends for light scattering films in liquid crystal displaysApplied Physics Letters, 2012
- Materials Development to Extend ArF Lithography Toward Sub-20nm PatterningJournal of Photopolymer Science and Technology, 2012
- Directed Self Assembly Materials for Hole PatterningJournal of Photopolymer Science and Technology, 2012