Oxidation behavior of AlN substrate at low temperature
Authors:
- J. W. LeeJLJ. W. Lee
- I. RaduIRI. Radu
- M. AlexeMAM. Alexe
- 1 March 2002
- journal article
- Published by Springer Nature in Journal of Materials Science: Materials in Electronics
- Vol. 13 (3) , 131-137
Abstract
No abstract availableKeywords
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