Design process of square column-shaped voice coil motor for magnetic levitation stage

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Abstract
Magnetic levitation is state-of-the-art technology to realize 6 degree of freedom motion stages. The major weakness of magnetic levitation technology is the small force of the actuators, since electromagnetic actuators usually have small force compared to other actuators. Moreover, they always have to be turned on in order to compensate for the weight of the stage. In this paper, voice coil motors, a kind of electromagnetic actuator, are designed for a magnetic levitation stage. Two different types of voice coil motors are mathematically modeled, analyzed and optimized to obtain high force. According to the optimized final designs, the voice coil motors are manufactured and their performances are evaluated. The optimal design results are compared with the finite element simulations and the test results of the manufactured products. Both types of voice coil motors show high force. The results are quantified and compared. Through the design process and the evaluation of the voice coil motors, a practical design guideline for a voice coil motor is suggested.

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