Low-frequency noise and defects in copper and ruthenium resistors
- 20 May 2019
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 114 (20) , 203501
Abstract
1.8-MeV proton irradiation to a fluence of 1014/cm2 does not significantly affect the resistance or low-frequency noise of copper or ruthenium resistors fabricated via modern microelectronic fabrication techniques used to form metal lines. The room-temperature noise of these Cu and Ru resistors is surprisingly similar to that of Cu and Pt metal lines and wires fabricated using late-1970s nanofabrication techniques; however, measurements of the temperature dependence of the noise show that the defect kinetics are quite different among the various materials. A large increase in the noise magnitude observed above 200 K in Cu but not in Ru is consistent with the superior resistance to electromigration that Ru lines have shown, relative to Cu.Keywords
Funding Information
- Defense Threat Reduction Agency
- Air Force Office of Scientific Research
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