Structure and microhardness of TiN compositional and alloyed films
Authors:
- R.A. AndrievskiRAR.A. Andrievski
- I.A. AnisimovaIAI.A. Anisimova
- V.P. AnisimovVAV.P. Anisimov
- 1 December 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 205 (2) , 171-175
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Mechanical properties of metallic filmsUspekhi Fizicheskih Nauk, 1968