Fabrication of silicon oxide microneedles from macroporous silicon

This publication has 11 references indexed in Scilit:

• Macroporous silicon based capacitive affinity sensor—fabrication and electrochemical studies
  Sensors and Actuators B: Chemical, 2003
• Asymmetric pores in a silicon membrane acting as massively parallel brownian ratchets
  Nature, 2003
• A model system for photonic crystals: macroporous silicon
  Physica Status Solidi (a), 2003
• Electrochemical etching in HF solution for silicon micromachining
  Sensors and Actuators A: Physical, 2002
• Barcoded molecules
  Nature Materials, 2002
• Optical shortpass filters based on macroporous silicon
  Applied Physics Letters, 2001
• Fabrication of Array of Hollow Microcapillaries Used for Injection of Genetic Materials into Animal/Plant Cells
  Japanese Journal of Applied Physics, 1999
• The limits of macropore array fabrication
  Thin Solid Films, 1997
• The Physics of Macropore Formation in Low Doped n‐Type Silicon
  Journal of the Electrochemical Society, 1993
• Formation Mechanism and Properties of Electrochemically Etched Trenches in n‐Type Silicon
  Journal of the Electrochemical Society, 1990