Silicon-to-silicon wafer bonding using evaporated glass
Authors:
- Steen WeichelSWSteen Weichel
- Roger de ReusRRRoger de Reus
- Michael LindahlMLMichael Lindahl
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2) , 179-184
Abstract
No abstract availableKeywords
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