Practical aspects of Kelvin probe force microscopy
Authors:
- 1 March 1999
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 70 (3) , 1756-1760
Abstract
We discuss practical aspects of Kelvin probe force microscopy (KFM) which are important to obtain stable images of the electric surface potential distribution at high spatial resolution (n-doped silicon tips show no substantial tip alterations and, therefore, provide a stable reference during the experiment (offset jumps typically up to 40 mV between adjacent scan lines). These semiconducting tips must be electrically connected via contact pads. We use InGa and colloidal silver pads which are easily applied to the substrate supporting the cantilever and have a low enough differential contact resistance (350 Ω and 2.2 kΩ, respectively). Furthermore, we introduce a simple procedure to fine tune the feedback which detects the electric surface potential and show how the basic KFM setup has to be modified to gain access to the necessary control signals.Keywords
This publication has 16 references indexed in Scilit:
- Kelvin Probe Force Microscopy for Potential Distribution Measurement of Cleaved Surface of GaAs DevicesJapanese Journal of Applied Physics, 1997
- Nanometer-scale imaging of potential profiles in optically excited n-i-p-i heterostructure using Kelvin probe force microscopyApplied Physics Letters, 1995
- Silicon pn junction imaging and characterizations using sensitivity enhanced Kelvin probe force microscopyApplied Physics Letters, 1995
- Improvement of Kelvin Probe Force Microscope (KFM) SystemJapanese Journal of Applied Physics, 1995
- Kelvin probe force microscopyApplied Physics Letters, 1991
- High resolution atomic force microscopy potentiometryJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1991
- Extremely low-noise potentiometry with a scanning tunneling microscopeReview of Scientific Instruments, 1989
- Direct measurement of potential steps at grain boundaries in the presence of current flowPhysical Review Letters, 1988
- High-resolution capacitance measurement and potentiometry by force microscopyApplied Physics Letters, 1988
- Scanning tunneling potentiometryApplied Physics Letters, 1986