The field and power absorption profiles in helicon plasma resonators
Author:
- 1 November 1996
- journal article
- Published by AIP Publishing in Physics of Plasmas
- Vol. 3 (11) , 4268-4275
Abstract
Analytic expressions are presented for electromagnetic waves excited by Boswell and Nagoya III type antennae [F. F. Chen, J. Vac. Sci. Technol. A 10, 1389 (1992)] in a uniform plasma column, and profiles of the wave field and power absorption are calculated. The Trivelpiece‐Gould mode is found to be dominant causing the surface electron heating, while the linear dependence of the plasma density on the magnetic field is obeyed. In addition, the fast helicon wave approximation, with which the electron inertia is neglected, is examined in detail and its validity is discussed.Keywords
This publication has 15 references indexed in Scilit:
- Resonances and anti-resonances of a plasma column in a helicon plasma sourcePhysics Letters A, 1995
- Helicon wave excitation with helical antennasPhysics of Plasmas, 1995
- Hot Spots and Electron Heating Processes in a Helicon-Wave Excited PlasmaJapanese Journal of Applied Physics, 1995
- Helicon wave propagation in the SHEILA heliacPlasma Physics and Controlled Fusion, 1995
- Resonance wave discharge and collisional energy absorption in helicon plasma sourcePlasma Physics and Controlled Fusion, 1994
- Plasma production by helicon wavesPlasma Sources Science and Technology, 1993
- Plasma ionization by helicon wavesPlasma Physics and Controlled Fusion, 1991
- The application of the helicon source to plasma processingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1991
- Ar ii laser generated by Landau damping of whistler waves at the lower hybrid frequencyPhysical Review Letters, 1989
- Very efficient plasma generation by whistler waves near the lower hybrid frequencyPlasma Physics and Controlled Fusion, 1984