Solid state reactions in titanium thin films on silicon
Authors:
- 1 May 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 34 (1) , 135-138
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Analysis of thin-film structures with nuclear backscattering and x-ray diffractionJournal of Vacuum Science and Technology, 1974
- Reaction kinetics of tungsten thin films on silicon (100) surfacesJournal of Applied Physics, 1973
- Growth Kinetics Observed in the Formation of Metal Silicides on SiliconApplied Physics Letters, 1972
- Seeman–Bohlin X-ray diffractometer for thin filmsJournal of Applied Crystallography, 1970