Tunable Optical Properties of SiN_xThin Films by OES Monitoring in a Reactive RF Magnetron Plasma

This publication has 45 references indexed in Scilit:

• Reactively sputtered coatings on architectural glazing for coloured active solar thermal façades
  Energy and Buildings, 2014
• A comprehensive review of solar facades. Opaque solar facades
  Renewable and Sustainable Energy Reviews, 2012
• The influence of oxygen in TiAlOxNy on the optical properties of colored solar-absorbing coatings
  Solar Energy Materials and Solar Cells, 2012
• Reduction of optical losses in colored solar cells with multilayer antireflection coatings
  Solar Energy Materials and Solar Cells, 2011
• Effective passivation of Si surfaces by plasma deposited SiOx/a-SiNx:H stacks
  Applied Physics Letters, 2011
• Façade solar collectors
  Solar Energy, 2006
• Thin film multilayer design types for colored glazed thermal solar collectors
  Solar Energy Materials and Solar Cells, 2005
• Composition, structure and properties of SiNx films fabricated by pulsed reactive closed-field unbalanced magnetron sputtering
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2005
• Optical properties, statistics of bond angle deformations and density of states in Si-rich a-SiNx:H alloys
  Journal of Non-Crystalline Solids, 1997
• Photovoltaic-integrated building facades
  Renewable Energy, 1996