Some effects of Al and O2 on the nitridation of silicon compacts
Authors:
- 1 September 1976
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 11 (9) , 1725-1733
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Sialons and related nitrogen ceramicsJournal of Materials Science, 1976
- Contribution to the Phase Diagram Si 3 N 4 ‐AlN‐Al 2 O 3 ‐SiO 2Journal of the American Ceramic Society, 1975
- Mass Spectrometric Studies of the Nitridation of SiliconJournal of the American Ceramic Society, 1975
- A mechanism for the nitridation of silicon powder compactsJournal of Materials Science, 1974
- Kinetics of Nitridation of Si Powder CompactsJournal of the American Ceramic Society, 1973
- Effect of Oxygen Impurities on the Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1973
- The nitriding of silicon powder compactsJournal of Materials Science, 1972
- High Temperature Oxidation of MetalsJournal of the Electrochemical Society, 1967
- Kinetics of the Oxidation and Nitridation of Silicon at High TemperaturesThe Journal of Physical Chemistry, 1958
- Beitrag zur Theorie des AnlaufvorgangsZeitschrift für Physikalische Chemie, 1933