Evanescent wave interference lithography for surface nano-structuring
Authors:
- Y ZhouYZY Zhou
- M H HongMHM H Hong
- J Y H FuhJFJ Y H Fuh
- L LuLLL Lu
- B S LukiyanchukBLB S Lukiyanchuk
- 23 November 2007
- journal article
- Published by IOP Publishing in Physica Scripta
- Vol. T129, 35-37
Abstract
No abstract availableKeywords
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