Nanoimprint lithography patterned GaAs templates for site-controlled InAs quantum dots
Authors:
- J. TommilaJTJ. Tommila
- A. TukiainenA. Tukiainen
- J. ViheriäläJVJ. Viheriälä
- A. SchrammASA. Schramm
- T. HakkarainenT. Hakkarainen
- A. AhoA. Aho
- P. StenbergPSP. Stenberg
- M. DumitrescuMDM. Dumitrescu
- M. GuinaM. Guina
- 1 May 2011
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 323 (1) , 183-186
Abstract
No abstract availableKeywords
Funding Information
- Finnish Academy (NANOTOMO (#118066), DAUNTLESS (#123951))
This publication has 19 references indexed in Scilit:
- Applications of UV-nanoimprint soft stamps in fabrication of single-frequency diode lasersMicroelectronic Engineering, 2009
- The evolution of self-assembled InAs/GaAs(001) quantum dots grown by growth-interrupted molecular beam epitaxyNanotechnology, 2008
- Effect of size non-uniformity on photoluminescence from ensembles of InAs quantum dots embedded in GaAsJournal of Materials Science, 2007
- Polymer Imprint Lithography with Molecular-Scale ResolutionNano Letters, 2004
- Etching of As- and P-based III–V semiconductors in a planar inductively coupled BCl3/Ar plasmaJournal of Electronic Materials, 2004
- Desorption process of GaAs surface native oxide controlled by direct Ga-beam irradiationJournal of Crystal Growth, 2003
- Local-order of chemically-prepared GaAs() surfacesSurface Science, 2002
- Atomic structure and electronic properties of HCl–isopropanol treated and vacuum annealed GaAs(100) surfaceApplied Surface Science, 1999
- Inductively coupled plasma etching of III–V semiconductors in BCl3-based chemistriesApplied Surface Science, 1999
- Application of low-defect reactive ion etching in plasma in combination with overgrowth for formation of GaAs/AlGaAs submicrometre structuresSemiconductor Science and Technology, 1996