Presence and origin of interface charges at atomic-layer deposited Al2O3/III-nitride heterojunctions
Authors:
- 7 November 2011
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 99 (19) , 193504
Abstract
Unlike silicon and traditional III-V semiconductors, the III-nitrides exhibit high spontaneous and piezoelectric polarization charges at epitaxial polar heterojunctions. In the process of investigating scaling properties of gate-stacks consisting atomic-layer deposited Al2O3/III-Nitride heterojunctions, we find interface charges that appear closely linked to the polarization charges of the underlying nitride substrate. Through capacitance-voltage measurement on a series of samples of varying dielectric thicknesses, we find the presence and propose an origin of benign donor-type interface charges (Qit ∼6 × 1013 cm−2) at the AlN/Al2O3 junction. This interface charge is almost equal to the net polarization charge in AlN. The polarization-related dielectric/AlN interface charge and the role of oxygen in the dielectric as a possible modulation dopant potentially offer opportunities for various device applications.Keywords
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