3D silicon micromachined RF resonators
Authors:
- F.J. SchmuckleFSF.J. Schmuckle
- O. YagliogluOYO. Yaglioglu
- J.-F. LuyJLJ.-F. Luy
- W. HeinrichWHW. Heinrich
- 27 August 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
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