Growth of columnar aluminum nitride layers on Si(111) by molecular beam epitaxy
Authors:
- S KarmannSKS Karmann
- H.P.D SchenkHSH.P.D Schenk
- U KaiserUKU Kaiser
- A FisselAFA Fissel
- Wo RichterWRWo Richter
- 1 December 1997
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 50 (1-3) , 228-232
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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