Reflection high energy electron diffraction and X-ray studies of AlN films grown on Si(111) and Si(001) by organometallic chemical vapour deposition
Authors:
- Yoshiki ChubachiYCYoshiki Chubachi
- Kiyotaka SatoKSKiyotaka Sato
- Kiyoaki KojimaKKKiyoaki Kojima
- 1 December 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 122 (3) , 259-270
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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