Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
- 1 July 2013
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 10510117,p. 1351-1353
Abstract
This paper will report on the deposition and characterization of piezoelectric AlN and Al x Sc 1-x N layers. A special focus is on the characterization regarding the mechanical stress in the films. Potential applications of the films are in ultrasonic microscopy, energy harvesting and SAW/BAW filters. To demonstrate the potential in ultrasonic applications, the pulse echo method was used.Keywords
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