Solar-Cell Suitable μc-Si Films Grown by ECR-CVD

This publication has 7 references indexed in Scilit:

• A Significant Reduction of Impurity Contents in Hydrogenated Microcrystalline Silicon Films for Increased Grain Size and Reduced Defect Density
  Japanese Journal of Applied Physics, 1998
• Growth of amorphous-layer-free microcrystalline silicon on insulating glass substrates by plasma-enhanced chemical vapor deposition
  Applied Physics Letters, 1997
• Purely Intrinsic Poly-silicon Films for n-i-p Solar Cells
  Japanese Journal of Applied Physics, 1997
• Device grade microcrystalline silicon owing to reduced oxygen contamination
  Applied Physics Letters, 1996
• Control of Grain Size and Texture of Poly-Si with Atomic Hydrogen Under In Situ Ellipsometric Observation
  MRS Proceedings, 1994
• Physical properties of semi-insulating polycrystalline silicon. II. Optical studies of thin films
  Journal of Applied Physics, 1993
• Quantitative analysis of the effect of disorder-induced mode coupling on infrared absorption in silica
  Physical Review B, 1988