Nucleation and coalescence in hydrogenated amorphous silicon studied by scanning tunneling microscopy
Authors:
- 3 October 1994
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (14) , 1760-1762
Abstract
Direct subnanometer‐scale observation was made on an ultrathin film of hydrogenated amorphous silicon deposited on a highly oriented pyrolytic graphite substrate, using a ultrahigh vacuum scanning tunneling microscopy. Subnanostructures with a size of 5–10 Å were observed on the top surface independent of the film thickness below 400 Å, which are speculated to be SiH3. It is demonstrated that coalescence between nuclei (clusters) is enhanced by a surface diffusion of SiH3 precursors.Keywords
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