Trapezoidal-shaped electrostatic comb-drive actuator with large displacement and high driving force density
- 23 January 2019
- journal article
- research article
- Published by Springer Nature in Microsystem Technologies
- Vol. 25 (8) , 3111-3118
Abstract
No abstract availableKeywords
Funding Information
- National Foundation for Science and Technology Development (107.01-2011.06)
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